STUDY OF MAGNETRON DEPOSITION AND IMMERSION COATING METHODS OBTAINING VANADIUM PENTOXIDE THIN FILMS

Abstract

In this work, thin coatings of vanadium oxide were obtained by magnetron deposition, immersion coating with different chemical composition of the initial solutions. Thermochromic and electrochromic behavior of thin-film coatings made of vanadium oxide causes great interest in this material in the smart windows industry. The methods of widely used deposition methods for obtaining vanadium pentoxide films were investigated, the basic physico-chemical properties of the coatings obtained were studied. As a result of research in the composite structure, semiconductors with VxOy demonstrate additional characteristics, which increase the scope of their application, including in nanophotonics and photovoltaics. The optical properties of nanoscale particles and quantum dots of vanadium oxide have well-adjustable parameters, which, along with the use of the surface plasmon resonance effect, endow the material with many advantages. The phase composition and crystal structure of the obtained samples were investigated by X-ray diffractometer X'pert PRO (PANalitical). The optical transmission and absorption spectra of the formed thin films were measured on a double-beam UV/Vis Specord plus spectrophotometer (Analytik Jena), while the cell position for the sample under study is located directly in front of the detector, which allows the analysis of cloudy samples.