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DEVELOPMENT OF HIGHLY SENSITIVE NANO-SIZED GAS SENSORS BASED ON METAL OXIDE SEMICONDUCTORS (MOS)

Authors

Name Affiliation
Yernar Shynybekov National Laboratory Astana, Nazarbayev University
Madina Sarsembina Nazarbayev University
Amanzhol Turlybekuly Национальная лаборатория Астана, Назарбаев Университет, Астана, Казахстан
Baktiyar Soltabayev Национальная лаборатория Астана, Назарбаев Университет, Астана, Казахстан

Published:

2022-12-21

Issue:

No. 4 (2022): "Vestnik D. Serikbayev of EKTU"

Section:

Статьи

Article language:

Russian

Keywords:

sensor, zinc oxide, acetone, semiconductors.

Abstract

ZnO-based crystalline nanorods have been obtained by grazing angle deposition (GLAD) with reactive magnetron sputtering. The change in sensitivity by changing the nanostructure is investigated, which potentially leads to a high efficiency of the gas sensor. Reduced sensor operating temperature to room temperature. The gas sensitivity of the obtained sensors for carbon dioxide, acetone and hydrogen was determined.

Author Biographies

Yernar Shynybekov

магистр, Национальная лаборатория Астана, Назарбаев Университет, Астана, Казахстан.

Madina Sarsembina

магистрант, Школа инженерии и цифровых наук, Назарбаев Университет, Астана, Казахстан

Amanzhol Turlybekuly

Аманжол Тұрлыбекұлы, PhD, Национальная лаборатория Астана, Назарбаев
Университет, Астана, Казахстан, E-mail: [email protected]

Baktiyar Soltabayev

Бактияр Солтабаев, PhD, Национальная лаборатория Астана, Назарбаев Университет, Астана, Казахстан

License

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Лицензия Creative Commons

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Shynybekov, Y., Sarsembina, M., Turlybekuly, A., & Soltabayev, B. (2022). DEVELOPMENT OF HIGHLY SENSITIVE NANO-SIZED GAS SENSORS BASED ON METAL OXIDE SEMICONDUCTORS (MOS). Вестник ВКТУ, (4), 254–261. Retrieved from https://vestnik.ektu.kz/index.php/vestnik/article/view/252